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Wafer Handling Processing Epi Crystal Growth CVD Susceptor

2025-04-13 introduction 3220

Model NO.:

CVD SIC COATING

Coating Color:

Silver Grey

Application:

Semiconductor Epitaxy

Feature:

Corrosion Resistant, Oxidation Resistant, Heat Resistance, Wear Resistance

Coating Structure:

Thin Film

Coating Material:

Sic

Substrate:

Isostatic Graphite

Coating:

β-Sic

Coating Thickness:

100-150μm

Flexural Strength:

≥50MPa

Material Consistency:

Over 95%

Material Purity:

99.9995%

Trademark:

DZ

Transport Package:

Wooden Box

Specification:

Customizable

Origin:

China

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