FF-63/80 series
1 Year After Sales
Oil Free
Rotary Vacuum Pump
Positive Displacement Pump
High Vacuum
Mainsuction Pump
Dry
KYKY
Polywood Box
62L or 82L/S, water or air cooling, 8*E-7Pa ( CF)
China
8414100090
Product Description
Turbo Molecular Pump , FF-63/80E or FF63/80HVE with integrated Drive module , Water/Air cooling , Grease lubrication ,
Advantages:
1. Compact structure for system integration
2. Module design for more selections
3. Higher fore-pressure tolerance
4. Any mounting position
Advantages:
1. Compact structure for system integration
2. Module design for more selections
3. Higher fore-pressure tolerance
4. Any mounting position
| Flange(In) | ISO-K/CF63 | Max. Fore-vacuum Pressure | N2:1500 |
| Flange(Out) KF | DN16 | Gas Throughout (sccm) | N2:35 |
| Pumping Speed( L/s) | N2:62/82 | He:30 | |
| He:55 | H2:19 | ||
| H2:34 | Ar:38 | ||
| Ar:65 | Rotation Speed ( rpm) | 72000 | |
| Compression Ratio | N2:109 | Run-Up Time(min) | ≤2 |
| He:105 | Cooling Type,Standard | Water or Air | |
| H2:104 | Cooling Water Consumption ( L/min) | 1 | |
| Ar:109 | Cooling Water Temperature(ºC) | ≤25 | |
| Ultimated Pressure(Pa) | CF:5×10-6 | Power Connection:Voltage (V AC) | DC24/AC220 |
| ISO-K:3×10-5 | Max.Power Consumption (W) | 90 | |
| Max. Continuous Fore-vacuum pressure(Pa) | 500/200 | Controller Model | TCP-100 |
