PQ181E; PQ181E H; PQ181E-R; PQ181EH-R
CE, ISO
Chemical, Glass, Semiconductor
Diffusion Tube
10-30ppm
1150
PQ
Wood Case
quartz sand
China
Product Description
Application
Semiconductor grade quartz tube is widely used in the oxidation and diffusion process in semiconductor wafer manufacturing.
Product Feature
Semiconductor grade quartz tube features high purity, low hydroxyl and high temperature resistance, etc.
Typical Size
| OD Range | OD Tolerance | WT Tolerance | Sliding | Ovality | Bow |
| OD<100.00 | ±1.00 | ±10.00% | 15.00% | 1.00% | 0.10% |
| 100.00≤OD<200.00 | ±1.00 | ±10.00% | 15.00% | 1.00% | 0.10% |
| 200.00≤OD<300.00 | ±1.00 | ±10.00% | 15.00% | 1.00% | 0.10% |
| 300.00≤OD<400.00 | ±1.00 | ±10.00% | 15.00% | 1.00% | 0.10% |
| 400.00≤OD<500.00 | ±1.00 | ±10.00% | 15.00% | 1.00% | 0.10% |
| 500.00≤OD<900.00 | ±2.00 | ±10.00% | 15.00% | 1.00% | 0.10% |
Physical & Chemical properties
i. Trace elements Unit:ppm
| Code | Criteria | Al | Ca | Cr | Cu | Fe | K | Li | Mg | Mn | Na | Ti | Zr |
| PQ181E PQ181E-R | Typical | 13 | 0.5 | <0.05 | <0.05 | 0.1 | 0.1 | 0.3 | 0.05 | 0.05 | 0.1 | 1.3 | 1 |
| Maximum | 19 | 1 | 0.1 | 0.1 | 0.5 | 1 | 1 | 0.2 | 0.2 | 1 | 2 | 2 | |
| PQ181EH PQ181EH-R | Typical | 8 | 0.6 | <0.05 | <0.01 | 0.1 | 0.1 | 0.2 | 0.05 | 0.05 | 0.1 | 1.3 | 1 |
| Maximum | 10 | 1 | 0.1 | <0.01 | 0.5 | 0.5 | 0.5 | 0.2 | 0.2 | 0.5 | 2 | 2 |
ii. OH Content
| PQ181E/ PQ181EH | OH<10ppm | PQ181E-R/ PQ181EH-R | OH<30ppm |
iii. Physical properties
| Item | Index Value |
| Density(g/cm3) | 2.2 |
| Heat Conductivity(w/m·k,1000ºC) | 2.28 |
| Coefficient of Thermal Expansion(ºC-1,1000ºC) | 5.5×10-7 |
| Softening Point(ºC) | 1670 |
| Annealing Point(ºC) | 1210 |
| Strain Point(ºC) | 1110 |
- Product has been certified TEL, LAM, AMAT ;
- Located in quartz hometown of China
- Purity of SiO2 can reach to 99.995-99.999%
- Full quartz products, supply for lighting, solar, optics, optical fiber, semiconductor and etc.
FAQ:
Q1. How can I get a sample to check your quality?
After price confirmation, you can require for samples to check our quality.
Q2. Which payment form you can accept?
A: T/T
Q3. Can I request to advance the shipment?
A: We can discuss with other customers and try to move up earlier.
Q4. Which shipping way can you provide?
A: We can provide shipping by sea, by air and by express.
Q5: What's your after-sale service?
A: Our quality warranty period is one year. Any quality problem will be solved to customer satisfactions.
